Technical Skills: Analog Circuit Design, RF Circuit Design, Cadence, PCB Design, System Design, Soft Skills: Leadership, Communications, Teamwork, Organization, Teaching Ability
Peng Shao; Mayberry, C.L.; Xin Gao; Tavassoli, V.; Ayazi, F., “A Polysilicon Microhemispherical Resonating Gyroscope,” Microelectromechanical Systems, Journal of , vol.23, no.4, pp.762,764, Aug. 2014
Abstract: This letter reports, for the first time, an integrated polysilicon microhemispherical resonating gyroscope (μHRG) with selfaligned drive, sense, and tuning electrodes, all fabricated using a single wafer process. The polysilicon hemispherical shell is 700 nm in thickness and 1.2 mm in diameter, resulting in a 1:3000 aspect ratio three-dimensional (3-D) microstructure. The quality factor of the wineglass mode is measured to be 8500 at 6.7 kHz with an as-fabricated frequency mismatch of 105 Hz between the two m = 2 degenerate modes. The modes are electrostatically matched and aligned using the tuning electrodes with a resulting mode-matched quality factor of 11100. Initial characterization of the sensitivity of the μHRG shows a scale factor of 4.4 mV/o/s.
“In recognition of high attainments in scholarship and in expectations of achievement in the profession of engineering”
Eta Kappa Nu Member 2010
Elected Eta Kappa Nu President 2011